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Chemical-Mechanical Planarization of Semiconductor Materials - Herausgegeben von Oliver, M.R.
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Herausgegeben von Oliver, M.R.:

Chemical-Mechanical Planarization of Semiconductor Materials - Taschenbuch

2010, ISBN: 9783642077388

[ED: Softcover], [PU: Springer, Berlin], This book contains a comprehensive review of CMP (Chemical-Mechanical Planarization) technology, one of the most exciting areas in the field of semiconductor technology. It contains detailed discussions of all aspects of the technology, for both dielectrics and metals. The state of polishing models and their relation to experimental results are covered. Polishing tools and consumables are also covered. The leading edge issues of damascene and new dielectrics as well as slurryless technology are discussed. This volume is a comprehensive review of CMP (Chemical-Mechanical Planarization) technology, which is now a major part of state-of-the-art semiconductor technology. There are detailed discussions of all aspects of the technology, for both dielectrics and metals. The state of polishing models and their relation to experimental results are covered. Polishing tools and consumables are also covered. The leading edge issues of damascene and new dielectrics as well as slurryless technology are discussed.2010. xi, 428 S. 276 SW-Abb.,. 235 mmVersandfertig in 3-5 Tagen, [SC: 0.00], Neuware, gewerbliches Angebot

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Chemical-Mechanical Planarization of Semiconductor Materials - neues Buch

ISBN: 9783642077388

ID: 978364207738

This book contains a comprehensive review of CMP (Chemical-Mechanical Planarization) technology, one of the most exciting areas in the field of semiconductor technology. It contains detailed discussions of all aspects of the technology, for both dielectrics and metals. The state of polishing models and their relation to experimental results are covered. Polishing tools and consumables are also covered. The leading edge issues of damascene and new dielectrics as well as slurryless technology are discussed. Books, Science and Nature, Chemical-Mechanical Planarization of Semiconductor Materials Books>Science and Nature, Springer Berlin Heidelberg

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Chemical-Mechanical Planarization of Semiconductor Materials - Herausgegeben von Oliver, M.R.
Vergriffenes Buch, derzeit bei uns nicht verfügbar.
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Herausgegeben von Oliver, M.R.:
Chemical-Mechanical Planarization of Semiconductor Materials - Taschenbuch

2010

ISBN: 9783642077388

[ED: Softcover], [PU: Springer, Berlin], This book contains a comprehensive review of CMP (Chemical-Mechanical Planarization) technology, one of the most exciting areas in the field of semiconductor technology. It contains detailed discussions of all aspects of the technology, for both dielectrics and metals. The state of polishing models and their relation to experimental results are covered. Polishing tools and consumables are also covered. The leading edge issues of damascene and new dielectrics as well as slurryless technology are discussed.2010. xi, 428 S. 276 SW-Abb.,. 235 mmVersandfertig in 3-5 Tagen, [SC: 0.00]

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Chemical-Mechanical Planarization of Semiconductor Materials - M.R. Oliver
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M.R. Oliver:
Chemical-Mechanical Planarization of Semiconductor Materials - Taschenbuch

ISBN: 9783642077388

ID: 9783642077388

Chemical-Mechanical Planarization of Semiconductor Materials Chemical-Mechanical-Planarization-of-Semiconductor-Materials~~M-R-Oliver Science/Tech>Engineering>Chemical Engr Paperback, Springer Berlin Heidelberg

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M.R. Oliver:
Chemical-Mechanical Planarization of Semiconductor Materials - Taschenbuch

2010, ISBN: 9783642077388

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Softcover reprint of hardcover 1st ed. 2004, Softcover, Buch, [PU: Springer Berlin]

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Details zum Buch
Chemical-Mechanical Planarization of Semiconductor Materials
Autor:

M.R. Oliver (Editor)

Titel:

Chemical-Mechanical Planarization of Semiconductor Materials

ISBN-Nummer:

9783642077388

This book contains a comprehensive review of CMP (Chemical-Mechanical Planarization) technology, one of the most exciting areas in the field of semiconductor technology. It contains detailed discussions of all aspects of the technology, for both dielectrics and metals. The state of polishing models and their relation to experimental results are covered. Polishing tools and consumables are also covered. The leading edge issues of damascene and new dielectrics as well as slurryless technology are discussed.

Detailangaben zum Buch - Chemical-Mechanical Planarization of Semiconductor Materials


EAN (ISBN-13): 9783642077388
Gebundene Ausgabe
Taschenbuch
Erscheinungsjahr: 2010
Herausgeber: Springer Berlin Heidelberg

Buch in der Datenbank seit 10.10.2014 08:23:08
Buch zuletzt gefunden am 21.09.2016 04:27:24
ISBN/EAN: 9783642077388

ISBN - alternative Schreibweisen:
978-3-642-07738-8

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