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CCD Image Sensors in Deep-Ultraviolet: Degradation Behavior and Damage Mechanisms - Flora Li
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CCD Image Sensors in Deep-Ultraviolet: Degradation Behavior and Damage Mechanisms - gebunden oder broschiert

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ID: 10798529906

[EAN: 9783540226802], Neubuch, [PU: Springer], FLORA LI,AROKIA NATHAN,ENGINEERING,TECHNOLOGY,SCIENCE AND MATHEMATICS,OPTICS, Technology|Imaging Systems, This item is printed on demand. Hardcover. 244 pages. As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although CCD cameras that are responsive at DUV wavelengths are now available, their long-term stability is still a major concern. This book describes the degradation mechanisms and long-term performance of CCDs in the DUV, along with new results of device performance at these wavelengths. This item ships from La Vergne,TN.

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CCD Image Sensors in Deep-Ultraviolet - Flora Li
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[ED: Buch], [PU: Springer-Verlag GmbH], Neuware - As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although CCD cameras that are responsive at DUV wavelengths are now available, their long-term stability is still a major concern. This book describes the degradation mechanisms and long-term performance of CCDs in the DUV, along with new results of device performance at these wavelengths. -, DE, [SC: 0.00], Neuware, gewerbliches Angebot, 242x162x17 mm, 242, [GW: 526g], offene Rechnung (Vorkasse vorbehalten), PayPal, Banküberweisung, Internationaler Versand

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CCD Image Sensors in Deep-Ultraviolet - Flora Li
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CCD Image Sensors in Deep-Ultraviolet - neues Buch

1, ISBN: 9783540226802

[ED: Buch], [PU: Springer-Verlag GmbH], Neuware - As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although CCD cameras that are responsive at DUV wavelengths are now available, their long-term stability is still a major concern. This book describes the degradation mechanisms and long-term performance of CCDs in the DUV, along with new results of device performance at these wavelengths. -, DE, [SC: 3.00], Neuware, gewerbliches Angebot, 242x162x17 mm, 242, [GW: 526g], offene Rechnung, Internationaler Versand

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CCD Image Sensors in Deep-Ultraviolet : Degradation Behavior and Damage Mechanisms - F. Li; A. Nathan
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CCD Image Sensors in Deep-Ultraviolet : Degradation Behavior and Damage Mechanisms - gebrauchtes Buch

ISBN: 354022680X

ID: 18728658

As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although CCD cameras that are responsive at DUV wavelengths are now available, their long-term stability is still a major concern. This book describes the degradation mechanisms and long-term performance of CCDs in the DUV, along with new results of device performance at these wavelengths. used books,books Books, Springer

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CCD Image Sensors in Deep-Ultraviolet Degradation Behavior and Damage Mechanisms - Li, Flora; Nathan, Arokia
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CCD Image Sensors in Deep-Ultraviolet Degradation Behavior and Damage Mechanisms - gebunden oder broschiert

2005, ISBN: 354022680X

ID: A3783678

2005 Gebundene Ausgabe Farbe, Mikrotechnologie - Mikrotechnik, Mikrotechnik ( Mikrotechnologie ), Technologie / Mikrotechnologie, Sensorik ( Sensor ), Sensor - Sensorik, Protège-cahier neu, [PU:Springer-Verlag GmbH; Springer Berlin]

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Details zum Buch
CCD Image Sensors in Deep-Ultraviolet: Degradation Behavior and Damage Mechanisms (Microtechnology and MEMS)

As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although CCD cameras that are responsive at DUV wavelengths are now available, their long-term stability is still a major concern. This book describes the degradation mechanisms and long-term performance of CCDs in the DUV, along with new results of device performance at these wavelengths. TOC:Introduction.- Overview of CCD.- CCD Imaging in the Ultraviolet Regime.- Silicon.- Silicon Dioxide.- Si-SiO2 Interface.- General Effects of Radiation.- Effects of Radiation on CCDs.- UV-Induced Effects in Silicon.- UV-Laser-Induced Effects in SiO2.- UV-Laser-Induced Effects in the Si-SiO2 Interface.- CCD Measurements at 157 nm.- Design Optimizations for Future Research.- Concluding Remarks.- Glossary.

Detailangaben zum Buch - CCD Image Sensors in Deep-Ultraviolet: Degradation Behavior and Damage Mechanisms (Microtechnology and MEMS)


EAN (ISBN-13): 9783540226802
ISBN (ISBN-10): 354022680X
Gebundene Ausgabe
Erscheinungsjahr: 2002
Herausgeber: Springer-Verlag GmbH

Buch in der Datenbank seit 22.05.2007 11:58:04
Buch zuletzt gefunden am 10.11.2017 17:55:56
ISBN/EAN: 354022680X

ISBN - alternative Schreibweisen:
3-540-22680-X, 978-3-540-22680-2


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