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High-sensitivity, Low-noise Multi-axis Capacitive Micro-accelerometers - For inertial sensing applications - Chae, Junseok
Vergriffenes Buch, derzeit bei uns nicht verfügbar.
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Chae, Junseok:
High-sensitivity, Low-noise Multi-axis Capacitive Micro-accelerometers - For inertial sensing applications - Taschenbuch

2009, ISBN: 9783639184280

[ED: Taschenbuch / Paperback], [PU: VDM Verlag Dr. Müller], High performance, micro-g resolution, small size, low cost, low power accelerometers are needed in many applications such as inertial navigation, Unmanned Aerial Vehicles (UAVs), and GPS augmentation. Several sensing methods have been used, including piezoresistive/electric, resonant, tunneling, and capacitive techniques. Capacitive sensing has several advantages in terms of high sensitivity, stable DC-characteristics, low power dissipation, low temperature sensitivity, and low noise floor. This research work demonstrates full functionality of high- sensitivity, low-noise capacitive multi-axis accelerometers. In order to achieve micro-g resolution, two different structures have been utilized: a Silicon-On-Glass (SOG) accelerometer, and an all-silicon accelerometer. A monolithic fabrication technique for Post-CMOS MEMS is also developed. Finally, a 3-axis single-chip accelerometer is presented. The 3-axis accelerometer shows 3pF/g sensitivity and sub- g/rtHz mechanical noise floor. The 3-axis accelerometer with the readout circuit provides noise floor of 1.6 g/rtHz and 1.1 g/rtHz for in-plane and out-of- plane devices, respectively., DE, [SC: 0.00], Neuware, gewerbliches Angebot, 180, [GW: 250g], Selbstabholung und Barzahlung, PayPal, offene Rechnung, Banküberweisung, Transporte marítimo internacional

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High-sensitivity, Low-noise Multi-axis Capacitive Micro-accelerometers - For inertial sensing applications - Chae, Junseok
Vergriffenes Buch, derzeit bei uns nicht verfügbar.
(*)
Chae, Junseok:
High-sensitivity, Low-noise Multi-axis Capacitive Micro-accelerometers - For inertial sensing applications - Taschenbuch

2009, ISBN: 9783639184280

[ED: Taschenbuch / Paperback], [PU: VDM Verlag Dr. Müller], High performance, micro-g resolution, small size, low cost, low power accelerometers are needed in many applications such as inertial navigation, Unmanned Aerial Vehicles (UAVs), and GPS augmentation. Several sensing methods have been used, including piezoresistive/electric, resonant, tunneling, and capacitive techniques. Capacitive sensing has several advantages in terms of high sensitivity, stable DC-characteristics, low power dissipation, low temperature sensitivity, and low noise floor. This research work demonstrates full functionality of high- sensitivity, low-noise capacitive multi-axis accelerometers. In order to achieve micro-g resolution, two different structures have been utilized: a Silicon-On-Glass (SOG) accelerometer, and an all-silicon accelerometer. A monolithic fabrication technique for Post-CMOS MEMS is also developed. Finally, a 3-axis single-chip accelerometer is presented. The 3-axis accelerometer shows 3pF/g sensitivity and sub- g/rtHz mechanical noise floor. The 3-axis accelerometer with the readout circuit provides noise floor of 1.6 g/rtHz and 1.1 g/rtHz for in-plane and out-of- plane devices, respectively., DE, [SC: 0.00], Neuware, gewerbliches Angebot, 180, [GW: 250g], Selbstabholung und Barzahlung, PayPal, offene Rechnung, Banküberweisung, Interntationaler Versand

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High-sensitivity, Low-noise Multi-axis Capacitive Micro-accelerometers - For inertial sensing applications - Chae, Junseok
Vergriffenes Buch, derzeit bei uns nicht verfügbar.
(*)
Chae, Junseok:
High-sensitivity, Low-noise Multi-axis Capacitive Micro-accelerometers - For inertial sensing applications - Taschenbuch

2009, ISBN: 9783639184280

[ED: Taschenbuch / Paperback], [PU: VDM Verlag Dr. Müller], High performance, micro-g resolution, small size, low cost, low power accelerometers are needed in many applications such as inertial navigation, Unmanned Aerial Vehicles (UAVs), and GPS augmentation. Several sensing methods have been used, including piezoresistive/electric, resonant, tunneling, and capacitive techniques. Capacitive sensing has several advantages in terms of high sensitivity, stable DC-characteristics, low power dissipation, low temperature sensitivity, and low noise floor. This research work demonstrates full functionality of high- sensitivity, low-noise capacitive multi-axis accelerometers. In order to achieve micro-g resolution, two different structures have been utilized: a Silicon-On-Glass (SOG) accelerometer, and an all-silicon accelerometer. A monolithic fabrication technique for Post-CMOS MEMS is also developed. Finally, a 3-axis single-chip accelerometer is presented. The 3-axis accelerometer shows 3pF/g sensitivity and sub- g/rtHz mechanical noise floor. The 3-axis accelerometer with the readout circuit provides noise floor of 1.6 g/rtHz and 1.1 g/rtHz for in-plane and out-of- plane devices, respectively., DE, [SC: 3.70], Neuware, gewerbliches Angebot, 180, [GW: 250g], Selbstabholung und Barzahlung, PayPal, offene Rechnung, Banküberweisung, Internationaler Versand

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High-sensitivity, Low-noise Multi-axis Capacitive Micro-accelerometers - For inertial sensing applications - Chae, Junseok
Vergriffenes Buch, derzeit bei uns nicht verfügbar.
(*)
Chae, Junseok:
High-sensitivity, Low-noise Multi-axis Capacitive Micro-accelerometers - For inertial sensing applications - Taschenbuch

2009, ISBN: 9783639184280

[ED: Taschenbuch / Paperback], [PU: VDM Verlag Dr. Müller], High performance, micro-g resolution, small size, low cost, low power accelerometers are needed in many applications such as inertial navigation, Unmanned Aerial Vehicles (UAVs), and GPS augmentation. Several sensing methods have been used, including piezoresistive/electric, resonant, tunneling, and capacitive techniques. Capacitive sensing has several advantages in terms of high sensitivity, stable DC-characteristics, low power dissipation, low temperature sensitivity, and low noise floor. This research work demonstrates full functionality of high- sensitivity, low-noise capacitive multi-axis accelerometers. In order to achieve micro-g resolution, two different structures have been utilized: a Silicon-On-Glass (SOG) accelerometer, and an all-silicon accelerometer. A monolithic fabrication technique for Post-CMOS MEMS is also developed. Finally, a 3-axis single-chip accelerometer is presented. The 3-axis accelerometer shows 3pF/g sensitivity and sub- g/rtHz mechanical noise floor. The 3-axis accelerometer with the readout circuit provides noise floor of 1.6 g/rtHz and 1.1 g/rtHz for in-plane and out-of- plane devices, respectively., DE, [SC: 0.00], Neuware, gewerbliches Angebot, 180, [GW: 250g], Selbstabholung und Barzahlung, PayPal, offene Rechnung, Banküberweisung, Internationaler Versand

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High-sensitivity, Low-noise Multi-axis Capacitive Micro-accelerometers - Junseok Chae
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High-sensitivity, Low-noise Multi-axis Capacitive Micro-accelerometers - neues Buch

ISBN: 9783639184280

ID: 0d8794849ec7b8f594b07143279c8d79

High performance, micro-g resolution, small size, low cost, low power accelerometers are needed in many applications such as inertial navigation, Unmanned Aerial Vehicles (UAVs), and GPS augmentation. Several sensing methods have been used, including piezoresistive/electric, resonant, tunneling, and capacitive techniques. Capacitive sensing has several advantages in terms of high sensitivity, stable DC-characteristics, low power dissipation, low temperature sensitivity, and low noise floor. This research work demonstrates full functionality of high- sensitivity, low-noise capacitive multi-axis accelerometers. In order to achieve micro-g resolution, two different structures have been utilized: a Silicon-On-Glass (SOG) accelerometer, and an all-silicon accelerometer. A monolithic fabrication technique for Post-CMOS MEMS is also developed. Finally, a 3-axis single-chip accelerometer is presented. The 3-axis accelerometer shows 3pF/g sensitivity and sub- g/rtHz mechanical noise floor. The 3-axis accelerometer with the readout circuit provides noise floor of 1.6 g/rtHz and 1.1 g/rtHz for in-plane and out-of- plane devices, respectively. Bücher / Naturwissenschaften, Medizin, Informatik & Technik / Technik, [PU: VDM Verlag Dr. Müller, Saarbrücken]

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Details zum Buch
High-sensitivity, Low-noise Multi-axis Capacitive Micro-accelerometers

High performance, micro-g resolution, small size, low cost, low power accelerometers are needed in many applications such as inertial navigation, Unmanned Aerial Vehicles (UAVs), and GPS augmentation. Several sensing methods have been used, including piezoresistive/electric, resonant, tunneling, and capacitive techniques. Capacitive sensing has several advantages in terms of high sensitivity, stable DC-characteristics, low power dissipation, low temperature sensitivity, and low noise floor. This research work demonstrates full functionality of high- sensitivity, low-noise capacitive multi-axis accelerometers. In order to achieve micro-g resolution, two different structures have been utilized: a Silicon-On-Glass (SOG) accelerometer, and an all-silicon accelerometer. A monolithic fabrication technique for Post-CMOS MEMS is also developed. Finally, a 3-axis single-chip accelerometer is presented. The 3-axis accelerometer shows 3pF/g sensitivity and sub-µg/rtHz mechanical noise floor. The 3-axis accelerometer with the readout circuit provides noise floor of 1.6µg/rtHz and 1.1µg/rtHz for in-plane and out-of- plane devices, respectively.

Detailangaben zum Buch - High-sensitivity, Low-noise Multi-axis Capacitive Micro-accelerometers


EAN (ISBN-13): 9783639184280
ISBN (ISBN-10): 3639184289
Gebundene Ausgabe
Taschenbuch
Erscheinungsjahr: 2009
Herausgeber: Vdm Verlag Aug 2009

Buch in der Datenbank seit 16.02.2007 21:19:05
Buch zuletzt gefunden am 01.11.2017 09:00:43
ISBN/EAN: 9783639184280

ISBN - alternative Schreibweisen:
3-639-18428-9, 978-3-639-18428-0


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