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Cmos Cantilever Sensor Systems
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Cmos Cantilever Sensor Systems - neues Buch

ISBN: 9783642077289

ID: 10702188

This book is intended for scientists and engineers in the field of micro- and nano- electro-mechanical systems (MEMS and NEMS) and introduces the development of cantilever-based sensor systems using CMOS-compatible micromachining from the design concepts and simulations to the prototype. It is also a useful resource for researchers on cantilever sensors and resonant sensors in general The. This book is intended for scientists and engineers in the field of micro- and nano- electro-mechanical systems (MEMS and NEMS) and introduces the development of cantilever-based sensor systems using CMOS-compatible micromachining from the design concepts and simulations to the prototype. It is also a useful resource for researchers on cantilever sensors and resonant sensors in general The reader will become familiar with the potential of the combination of two technological approaches: IC fabrication technology, notably CMOS technology, and silicon micromachining and the resulting microstructures such as cantilever beams. It was recognized early that these two technologies should be merged in order to make the microstructures smart and devise integrated microsystems with on-chip driving and signal conditioning circuitry - now known as CMOS MEMS or, with the arrival of nanostructures, CMOS NEMS. One way to achieve the merger is the post-processing micro- or nano- machining of finished CMOS wafers, some of which is described in this book. The book introduces this approach based on work carried out at the Physical Electronics Laboratory of ETH Zurich on arrays of cantilever transducers with on-chip driving and signal conditioning circuitry. These cantilevers are familiar from Scanning Probe Microscopy (SPM) and allow the sensitive detection of phys- ical quantities such as forces and mass changes. The book is divided into three parts. First, general aspects of cantilever resona- tors are introduced, e.g. their resonant behavior and possible driving and sensing mechanisms. Books, Science and Geography~~Physics~~Applied Physics, Cmos Cantilever Sensor Systems~~Book~~9783642077289~~H. Baltes, O. Brand, Lange D, , , , , , , , , ,, [PU: Springer, Berlin/Heidelberg/New York, NY]

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CMOS Cantilever Sensor Systems - Lange, D. Brand, O. Baltes, H.
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Lange, D. Brand, O. Baltes, H.:
CMOS Cantilever Sensor Systems - Taschenbuch

2010, ISBN: 9783642077289

[ED: Softcover], [PU: Springer, Berlin], This book is intended for scientists and engineers in the field of micro- and nano electro-mechanical systems (MEMS and NEMS) and introduces the development of cantilever-based sensor systems using CMOS-compatible micromachining from the design concepts and simulations to the prototype. It is also a useful resource for researchers on cantilever sensors and resonant sensors in general The reader will become familiar with the potential of the combination of two technological approaches: IC fabrication technology, notably CMOS technology, and silicon micromachining and the resulting microstructures such as cantilever beams. It was recognized early that these two technologies should be merged in order to make the microstructures smart and devise integrated microsystems with on-chip driving and signal conditioning circuitry - now known as CMOS MEMS or, with the arrival of nanostructures, CMOS NEMS. One way to achieve the merger is the post-processing micro- or nano- machining of finished CMOS wafers, some of which is described in this book. The book introduces this approach based on work carried out at the Physical Electronics Laboratory of ETH Zurich on arrays of cantilever transducers with on-chip driving and signal conditioning circuitry. These cantilevers are familiar from Scanning Probe Microscopy (SPM) and allow the sensitive detection of phys ical quantities such as forces and mass changes. The book is divided into three parts. First, general aspects of cantilever resona tors are introduced, e. g. their resonant behavior and possible driving and sensing mechanisms. Softcover reprint of the original 1st ed. 2002. 2010. viii, 142 S. 65 SW-Abb.,. 235 mm Sofort lieferbar, [SC: 0.00], Neuware, gewerbliches Angebot

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CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications - D. Lange, O. Brand, H. Baltes
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D. Lange, O. Brand, H. Baltes:
CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications - neues Buch

ISBN: 9783642077289

ID: 978364207728

This book introduces the use of industrial CMOS processes to produce arrays of nanomechanical cantilever transducers with on-chip driving and signal conditioning circuitry. These cantilevers are familiar from Scanning Probe Microscopy (SPM) and allow the sensitive detection of physical quantities such as forces and mass changes. The book is divided into three parts. First fabrication aspects and the mechanisms of cantilever resonators are introduced. Of the possible driving and sensing mechanisms, electrothermal and magnetic excitation, as well as piezoresistive detection and the use of MOS transistors for the deflection detection are introduced. This is followed by two application examples: The use of resonant cantilevers for the mass-sensitive detection of volatile organic compounds, and force sensor arrays for parallel Scanning Atomic Force Microscopy (AFM) of large areas. D. Lange, O. Brand, H. Baltes, Books, Science and Nature, CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications Books>Science and Nature, Springer Berlin Heidelberg

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CMOS Cantilever Sensor Systems Atomic-Force Microscopy and Gas Sensing Applications 1st Edition - D. Lange
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D. Lange:
CMOS Cantilever Sensor Systems Atomic-Force Microscopy and Gas Sensing Applications 1st Edition - neues Buch

ISBN: 9783642077289

ID: 9783642077289

CMOS Cantilever Sensor Systems Atomic-Force Microscopy and Gas Sensing Applications 1st Edition Author :D. Lange 9783642077289 3642077285, [PU: Springer, Berlin/Heidelberg/New York, NY]

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CMOS Cantilever Sensor Systems - D. Lange; O. Brand; H. Baltes
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D. Lange; O. Brand; H. Baltes:
CMOS Cantilever Sensor Systems - Taschenbuch

2010, ISBN: 9783642077289

ID: 14937306

Atomic Force Microscopy and Gas Sensing Applications, Softcover reprint of the original 1st ed. 2002, Softcover, Buch, [PU: Springer Berlin]

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Details zum Buch
CMOS Cantilever Sensor Systems

This book introduces the use of industrial CMOS processes to produce arrays of nanomechanical cantilever transducers with on-chip driving and signal conditioning circuitry. These cantilevers are familiar from Scanning Probe Microscopy (SPM) and allow the sensitive detection of physical quantities such as forces and mass changes. The book is divided into three parts. First fabrication aspects and the mechanisms of cantilever resonators are introduced. Of the possible driving and sensing mechanisms, electrothermal and magnetic excitation, as well as piezoresistive detection and the use of MOS transistors for the deflection detection are introduced. This is followed by two application examples: The use of resonant cantilevers for the mass-sensitive detection of volatile organic compounds, and force sensor arrays for parallel Scanning Atomic Force Microscopy (AFM) of large areas.

Detailangaben zum Buch - CMOS Cantilever Sensor Systems


EAN (ISBN-13): 9783642077289
ISBN (ISBN-10): 3642077285
Gebundene Ausgabe
Taschenbuch
Erscheinungsjahr: 2010
Herausgeber: Springer-Verlag GmbH
152 Seiten
Gewicht: 0,240 kg
Sprache: eng/Englisch

Buch in der Datenbank seit 23.09.2011 09:17:34
Buch zuletzt gefunden am 30.11.2016 21:20:27
ISBN/EAN: 9783642077289

ISBN - alternative Schreibweisen:
3-642-07728-5, 978-3-642-07728-9


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