As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semi… Mehr…
As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although CCD cameras that are responsive at DUV wavelengths are now available, their long-term stability is still a major concern. This book describes the degradation mechanisms and long-term performance of CCDs in the DUV, along with new results of device performance at these wavelengths.; PDF; Scientific, Technical and Medical > Physics > Light, Springer Berlin Heidelberg<
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As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semi… Mehr…
As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although CCD cameras that are responsive at DUV wavelengths are now available, their long-term stability is still a major concern. This book describes the degradation mechanisms and long-term performance of CCDs in the DUV, along with new results of device performance at these wavelengths.; PDF; Scientific, Technical and Medical > Physics > Light, Springer Berlin Heidelberg<
hive.co.uk
No. 9783540274124. Versandkosten:Instock, Despatched same working day before 3pm, zzgl. Versandkosten. Details...
(*) Derzeit vergriffen bedeutet, dass dieser Titel momentan auf keiner der angeschlossenen Plattform verfügbar ist.
CCD Image Sensors in Deep-Ultraviolet ab 181.99 € als pdf eBook: Degradation Behavior and Damage Mechanisms. Aus dem Bereich: eBooks, Sachthemen & Ratgeber, Technik, Medien > Bücher, CCD … Mehr…
CCD Image Sensors in Deep-Ultraviolet ab 181.99 € als pdf eBook: Degradation Behavior and Damage Mechanisms. Aus dem Bereich: eBooks, Sachthemen & Ratgeber, Technik, Medien > Bücher, CCD Image Sensors in Deep-Ultraviolet - eBook als pdf von Arokia Nathan/ Flora Li - Springer-Verlag GmbH - 9783540274124<
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(*) Derzeit vergriffen bedeutet, dass dieser Titel momentan auf keiner der angeschlossenen Plattform verfügbar ist.
As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semi… Mehr…
As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although CCD cameras that are responsive at DUV wavelengths are now available, their long-term stability is still a major concern. This book describes the degradation mechanisms and long-term performance of CCDs in the DUV, along with new results of device performance at these wavelengths.; PDF; Scientific, Technical and Medical > Physics > Light, Springer Berlin Heidelberg<
No. 9783540274124. Versandkosten:Instock, Despatched same working day before 3pm, zzgl. Versandkosten.
As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semi… Mehr…
As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although CCD cameras that are responsive at DUV wavelengths are now available, their long-term stability is still a major concern. This book describes the degradation mechanisms and long-term performance of CCDs in the DUV, along with new results of device performance at these wavelengths.; PDF; Scientific, Technical and Medical > Physics > Light, Springer Berlin Heidelberg<
No. 9783540274124. Versandkosten:Instock, Despatched same working day before 3pm, zzgl. Versandkosten.
CCD Image Sensors in Deep-Ultraviolet ab 181.99 € als pdf eBook: Degradation Behavior and Damage Mechanisms. Aus dem Bereich: eBooks, Sachthemen & Ratgeber, Technik, Medien > Bücher, CCD … Mehr…
CCD Image Sensors in Deep-Ultraviolet ab 181.99 € als pdf eBook: Degradation Behavior and Damage Mechanisms. Aus dem Bereich: eBooks, Sachthemen & Ratgeber, Technik, Medien > Bücher, CCD Image Sensors in Deep-Ultraviolet - eBook als pdf von Arokia Nathan/ Flora Li - Springer-Verlag GmbH - 9783540274124<
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Detailangaben zum Buch - CCD Image Sensors in Deep-Ultraviolet
EAN (ISBN-13): 9783540274124 ISBN (ISBN-10): 354027412X Erscheinungsjahr: 2006 Herausgeber: Springer Berlin 231 Seiten Sprache: eng/Englisch
Buch in der Datenbank seit 2009-03-03T04:26:09+01:00 (Berlin) Detailseite zuletzt geändert am 2023-02-21T19:08:18+01:00 (Berlin) ISBN/EAN: 354027412X
ISBN - alternative Schreibweisen: 3-540-27412-X, 978-3-540-27412-4 Alternative Schreibweisen und verwandte Suchbegriffe: Autor des Buches: hans stark Titel des Buches: not his image, into the deep, degradation, ultraviolet
Daten vom Verlag:
Autor/in: Flora Li; Arokia Nathan Titel: Microtechnology and MEMS; CCD Image Sensors in Deep-Ultraviolet - Degradation Behavior and Damage Mechanisms Verlag: Springer; Springer Berlin 232 Seiten Erscheinungsjahr: 2006-01-05 Berlin; Heidelberg; DE Sprache: Englisch 149,79 € (DE) 154,00 € (AT) 177,00 CHF (CH) Available XII, 232 p. 84 illus.
Overview of CCD.- CCD Imaging in the Ultraviolet (UV) Regime.- Silicon.- Silicon Dioxide.- Si-SiO2 Interface.- General Effects of Radiation.- Effects of Radiation on CCDs.- UV-Induced Effects in Si.- UV Laser Induced Effects in SiO2.- UV Laser Induced Effects at the Si-SiO2 Interface.- CCD Measurements at 157nm.- Design Optimizations for Future Research.- Concluding Remarks. The first book to integrate CCD image sensor characteristics, their intrinsic instabilities, and the effect of UV radiation on device characteristics
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